| 基于有限元法的片式电阻阻值与激光刻蚀路径关系的研究 |
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| 引用本文： | 王志娟,郑玉彤,汤建华.基于有限元法的片式电阻阻值与激光刻蚀路径关系的研究[J].中央民族大学学报(自然科学版),2007,16(4):318-324. |
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| 作者姓名： | 王志娟 郑玉彤 汤建华 |
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| 作者单位： | 1. 中央民族大学,信息工程学院,北京,10008
2. 中国科学院,长春光学精密机械与物理研究所,吉林,长春,130033 |
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| 基金项目： | 中央民族大学校科研和校改项目 |
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| 摘 要： | 激光对片式电阻的刻蚀路径直接影响片式电阻的阻值精度,掌握激光刻蚀路径对片阻阻值的影响可为精调片阻阻值提供理论依据.掌握激光刻蚀路径与片阻阻值关系的前提是确定准确、有效的研究方法,首先,应确定片阻阻值与激光刻蚀路径关系的物理模型,然后应用有限元法计算该物理模型的数值解,分析、处理这些数据可得到不同型号片阻阻值与不同刻蚀路径之间的定量关系;经实验验证表明,利用有限元法得到的片阻阻值与刻蚀路径的关系函数的计算偏差不大于2%,可以应用有限元法研究激光刻蚀路径对片阻阻值的影响,进而为精调片阻阻值提供了控制依据.
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| 关 键 词： | 激光凋阻 凋阻精度 激光刻蚀路径 有限元 |
| 文章编号： | 1005-8036（2007）04-0318-07 |
| 修稿时间： | 2007-07-11 |
The Influence Investigation of Laser Trimming Path on the Resistance of Chip Resistors based on the Finite Element |
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| WANG Zhi-juan,ZHEN Yu-tong,TANG Jian-hua.The Influence Investigation of Laser Trimming Path on the Resistance of Chip Resistors based on the Finite Element[J].Journal of The Central University for Nationalities(Natural Sciences Edition),2007,16(4):318-324. |
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| Authors: | WANG Zhi-juan ZHEN Yu-tong TANG Jian-hua |
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| Institution: | 1. Information Engineering College Central University for Nationalities, Beijng 100081, China ;2. Institute of 0ptics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun , Jilin 130022, China |
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| Abstract: | The laser trimming path affects the precision of chip resistors.Their relationship can provide the control basis for improving the trimming precision.The precondition of mastering their relationship is applying the exact and efficient method.First,the physical model of chip resistor is provided.Then the finite element method is used to solve the physical model.Finally,the dependence of resistance on laser trimming path is gotten and quantitative formula is fitted.The experimental data validated that the calculating error of fitted formula is less than 2%.Applying the finite element method can study the relationship of resistance and laser trimming path.And the relationship can provide control basis for laser trimming process. |
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| Keywords: | laser trimming the precision of laser trimming laser trimming path the finite element |
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