影响激光散斑表面粗糙度测量的因素

为提高表面粗糙度的识别精度,以灰度共生矩阵特征参数之一的能量为例,研究与其相关的影响因素。采用半导体激光器照射粗糙表面,通过CCD获取图像,求取能量值,并绘制与各影响因素的关系曲线,研究不同实验条件下能量值和表面粗糙度的关系。结果表明,采用合适的光照度、入射角和照射面积等,可以提高测量系统的表面粗糙度分辨率。

Factors influencing laser speckle in surface roughness measurement

This paper attempts to improve the recognition accuracy of the surface roughness by using one of the parameters of co-occurrence matrix——energy as an example to identify the relationship between the energy and factors of impact.The improvement consists of illuminating roughness surface by a laser light,capturing images by a CCD camera,obtaining the energy value,and developing the graph of relationship between the energy and factors of impact,along with the investigation into the relationship between the energy and surface roughness under different experimental conditions.The result indicates that the improved recognition accuracy of the system of surface roughness measurement can be obtained by using suitable intensity of laser light,angle of incidence and area of illumination.