含过渡金属氮化物的纳米多层薄膜增韧的研究进展

过渡金属氮化物（transition metal nitrides, TMNs）因具有硬度高、热稳定性好等特点，被作为一种硬质纳米多层薄膜在工程领域得到广泛使用。但TMNs低的韧性限制了其作为纳米多层薄膜在先进制造领域的发展。如何在保持高硬度的前提下增加薄膜的韧性，成为超硬薄膜面临的新挑战。综述了TMNs纳米多层薄膜的增韧研究进展，包括TMNs薄膜传统的增韧方法（延性相增韧、相变增韧、压应力增韧、结构优化增韧）以及通过提高价电子浓度来增强硬质陶瓷薄膜韧性的可行途径；并提出通过合理的化学成分、宏观结构（衬底约束）和微观结构（原子有序）的设计，可以获得超硬和超韧的超晶格TMNs薄膜。

Research Progress on Toughening of Nano-multilayer Films Containing Transition Metal Nitrides

Transition metal nitrides (TMNs) have the characteristics of high hardness and good thermal stability. However, the low toughness of TMNs limits the development of TMNs as nano-multilayer films in the field of advanced manufacturing. On the premise of maintaining high hardness, how to increase the toughness of films has become a new challenge for super-hard films. The toughening research progress of TMNs nano-multilayer films is reviewed, including the traditional toughening methods (ductile phase toughening, phase transformation toughening, compressive stress toughening and structure optimization toughening) and the feasible ways to enhance the toughness of hard ceramic films by increasing the valence electron concentration. It is proposed that super-hard and super-tough super-lattice TMNs films can be obtained by reasonable design of chemical composition, macrostructure (substrate constraint) and microstructure (atomic ordering).