| 反射率极值法监控薄膜淀积的计算机模拟 |
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| 引用本文： | 张晓晖,陈清明,汤玮,杨光.反射率极值法监控薄膜淀积的计算机模拟[J].华中科技大学学报(自然科学版),2000,28(11):45-47. |
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| 作者姓名： | 张晓晖 陈清明 汤玮 杨光 |
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| 作者单位： | 华中理工大学激光技术国家重点实验室 |
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| 摘 要： | 利用计算机计算薄膜在反射率极值法监控的镀膜系统上淀积时监控片反射率的实时变化并模拟薄膜的实际淀积过程，得出设计膜系在一定制备工艺条件下所获得成膜的膜系结构，根据模拟结果计算的光学特性曲线与实际淀积出的成膜实测值相吻合.
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| 关 键 词： | 薄膜淀积 反射率极值监控法 膜厚监控误差 计算机模拟 |
| 文章编号： | 1000-8616(2000)11-0045-03 |
| 修稿时间： | 2000年6月15日 |
Computer Simulation of Optical Coating Deposition Monitored by the Reflectance Turning Point |
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| Zhang Xiaohui Chen Qingming Tang Wei Yang Guang National Lab. of Laser Technology,HUST,Wuhan ,China..Computer Simulation of Optical Coating Deposition Monitored by the Reflectance Turning Point[J].JOURNAL OF HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY.NATURE SCIENCE,2000,28(11):45-47. |
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| Authors: | Zhang Xiaohui Chen Qingming Tang Wei Yang Guang National Lab of Laser Technology HUST Wuhan China |
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| Institution: | Zhang Xiaohui Chen Qingming Tang Wei Yang Guang National Lab. of Laser Technology,HUST,Wuhan 430074,China. |
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| Abstract: | A program has been developed to calculate the real time variation of the reflectivity on the monitoring chips and to simulate the deposition process of a coating with quarterwave optical thickness layers taking the reflectance turning point monitoring approach. The optical thickness of each layer of the deposited coating can be got by the computer programmer. The computer simulation accords with the experiment results. |
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| Keywords: | thin film deposition turning point monitoring approach thickness error computer simulation |
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