| 硅扩散型压力敏感元器件的研制 |
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| 引用本文： | 硅扩散型压力敏感元器件的研制[J]. 华南师范大学学报（自然科学版）, 1988, (2): 1. |
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| 作者姓名： | 蔡春荣 韩少凤 张祖荫 |
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| 作者单位： | 华南师范大学微电子学研究所(蔡春荣，韩少凤)，华南师范大学微电子学研究所(张祖荫) |
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| 摘 要： | 硅扩散型压力传感器件自70年代问世以来,由于它有诸多优点,受到许多技术先进国家的重视.本文着重介绍作者所做的工作,即扩散型压力敏感元器件的特点、压力效应、圆片应力分析、制造的关键工艺和敏感元器件的结构设计及其应用,并提出对今后研究发展的见解.
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| 关 键 词： | 扩散型压敏元件 压敏电阻 传感器 膜片 硅杯 半导体 应变分析 |
DEVELOPMENT OF SILICON DIFFUSED TYPE PRESSURE SENSOR |
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| Zai Chunrong Han Shaofeng Zhang Zuyin. DEVELOPMENT OF SILICON DIFFUSED TYPE PRESSURE SENSOR[J]. Journal of South China Normal University(Natural Science Edition), 1988, 0(2): 1 |
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| Authors: | Zai Chunrong Han Shaofeng Zhang Zuyin |
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| Abstract: | Coming into existence in 1970's with its many advantages, the diffused type pressure sensing elements are valued in many advanced countries. Some studies are made with regard to its characteristics, piezo-resistance effect, disk strain analysis, key techniques of manufacturing as well as design and application. Some opinion about furthering the research is also covered. |
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| Keywords: | diffused type pressure sensing element piezo-resistance effect transducer diaphragm Silicon ring Semiconductor stralyzer |
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