| 关于硅基薄膜波导结构特性的研究 |
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| 引用本文： | 祖继锋. 关于硅基薄膜波导结构特性的研究[J]. 辽宁师范大学学报(自然科学版), 1997, 20(3): 198-202 |
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| 作者姓名： | 祖继锋 |
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| 作者单位： | 辽宁师范大学物理系 |
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| 基金项目： | 辽宁省科委博士基金,国家863高技术基金 |
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| 摘 要： | 研究了在硅基底上采用等离子体增强化学汽仃淀积氮氧化硅所形成导波结构的特性。分析了应用特点，存在问题及今后研究方向。
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| 关 键 词： | 硅基底 光互连 光波导 氮氧化硅 薄膜 PECVD |
A STUDY OF PROPERTIES OF FILM WAVEGUIDES BASED ON SILICONCON |
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| Zu Jifeng. A STUDY OF PROPERTIES OF FILM WAVEGUIDES BASED ON SILICONCON[J]. Journal of Liaoning Normal University(Natural Science Edition), 1997, 20(3): 198-202 |
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| Authors: | Zu Jifeng |
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| Abstract: | The characteristics of guided wave structures of SION fabricated by PECVD are studied.By analyzing experimental results,some improved methods are presented.Taking the photoresist as an example,the technological process is investigated,and the feature of its application.Problems and the trend of devlcopment are analysed. |
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| Keywords: | silicon substrate optoelectronics optical interconnection optical waveguide |
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