| CVD金刚石涂层刀具附着力的研究 |
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| 引用本文： | 张志明,何贤昶.CVD金刚石涂层刀具附着力的研究[J].上海交通大学学报,1998,32(3):103-106. |
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| 作者姓名： | 张志明 何贤昶 |
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| 作者单位： | 上海交通大学微电子技术研究所 |
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| 基金项目： | 国家863高科技基金资助项目,上海市科技发展基金 |
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| 摘 要： | 以压痕法涂层破碎时的负荷来评估附着力，采用稀盐酸对衬底进行表面处理，在ＣＶＤ沉积过程中添加适量粘结促进剂以压抑金属钴的催化墨化作用，沉积合适的厚度，可在硬质合金衬底上得到高附着力的金刚石涂层刀具．用该刀具对含碳化硅颗粒的铝基复合材料进行切削试验，得到了满意的结果．
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| 关 键 词： | 金刚石涂层 刀具 附着力 切削试验 |
Investigation of Adhesion of CVD Diamond Coating Tools |
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| Zhang Zhiming,He Xianchang,Shen Hesheng,Li Shenghua.Investigation of Adhesion of CVD Diamond Coating Tools[J].Journal of Shanghai Jiaotong University,1998,32(3):103-106. |
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| Authors: | Zhang Zhiming He Xianchang Shen Hesheng Li Shenghua |
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| Abstract: | The relationship of adhesion of diamond films coated on WC Co substrates to the pretreatment methods of substrates, CVD technological processes and the thickness of coated layers is investigated. The adhesion is evaluated with the minimal indenting loading at which the diamond films are broken. The high adhesive diamond coating inserts are prepared. It shows an excellent performance in cutting test for SiC composites with Al materials. |
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| Keywords: | diamond coating cutting tool adhering cutting test |
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