| X射线双晶衍射研究LP－MOVPE生长的InGaAs／GaAs应变超晶格 |
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| 引用本文： | 崔敬忠,陈光华,甘润今,张仿清,杨树人,刘宝林,陈佰军,刘式墉.X射线双晶衍射研究LP－MOVPE生长的InGaAs／GaAs应变超晶格[J].兰州大学学报(自然科学版),1996(3). |
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| 作者姓名： | 崔敬忠 陈光华 甘润今 张仿清 杨树人 刘宝林 陈佰军 刘式墉 |
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| 作者单位： | 兰州大学物理系，吉林大学电子工程系 |
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| 基金项目： | 集成光电子国家重点实验室资助 |
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| 摘 要： | 用金属有机气相外延（ＬＰ－ＭＯＶＰＥ）生长了一系列具有不同应变、不同周期以及不同缓冲层的ＩｎＧａＡｓ／ＧａＡｓ应变超晶格．用Ｘ射线双晶衍射方法得到了样品的摇摆曲线．结合计算机模拟得到了样品的应变、组分等结构参数．对不同缓冲层的超晶格结构也进行了分析
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| 关 键 词： | 气相外延生长 超晶格半导体 X射线衍射 |
X ray Double Crystal Diffraction Study of InGaAs/GaAs Strained Layer Superlattices with Different Buffer Layers Grown by LP MOVPE |
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| Cui Jingzhong,Chen Guanghua,Gan Runjing,Zhang Fangqing.X ray Double Crystal Diffraction Study of InGaAs/GaAs Strained Layer Superlattices with Different Buffer Layers Grown by LP MOVPE[J].Journal of Lanzhou University(Natural Science),1996(3). |
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| Authors: | Cui Jingzhong Chen Guanghua Gan Runjing Zhang Fangqing |
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| Abstract: | A series of InGaAs/GaAs superlattices with different buffer layers, strains and periods has been grown by LP MOVPE. X ray double crystal diffraction and dynamical simulation have been used to study the structural properties of the samples. The effects of different buffer layers have been discussed briefly. |
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| Keywords: | LP MOVPE strained layer superlattices X ray double crystal diffraction |
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