| 连续波激光诱导扩散区温度的不接触测量 |
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| 引用本文： | 李忠东 叶玉堂. 连续波激光诱导扩散区温度的不接触测量[J]. 应用科学学报, 1997, 15(4): 413-417 |
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| 作者姓名： | 李忠东 叶玉堂 |
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| 作者单位： | 电子科技大学 |
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| 基金项目： | 国家自然科学基金，国防科工委资助 |
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| 摘 要： | 激光诱导扩散中曝光区的大小在１０μｍ数量级，其温度分布的测量是比较困难的，该文报道一种曝光区中极微小面元的不接触测量，文中介绍了测量原理，实验装置，给出了实验结果，并特地介绍了测量系统的定标。
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| 关 键 词： | 激光诱导扩散 温度测量 半导体 不接触测量 |
REMOTE SENSING OF THE TEMPERATURE OF THE EXPOSED REGION IN LASER ASSISTED DIFFUSION |
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| LI ZHONGDONG,YE YUTANG,HONG YONGHE,YE JING,LI JIAXU. REMOTE SENSING OF THE TEMPERATURE OF THE EXPOSED REGION IN LASER ASSISTED DIFFUSION[J]. Journal of Applied Sciences, 1997, 15(4): 413-417 |
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| Authors: | LI ZHONGDONG YE YUTANG HONG YONGHE YE JING LI JIAXU |
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| Abstract: | The determination of the temperature distribution in the exposed region is something difficult since the size of the exposed region in laser assisted diffusion is only of the order 10 microns. Remote sensing of the temperature of the extrasmall areas in that exposed region is reported. The theoretical principle, experimental set-up and the experimental results are presented, and especially, the callibration of the temperature sensing system is discussed in detail. |
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| Keywords: | laser assisted diffusion laser assisted processing measurement of temperature semiconductor |
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