压电驱动菱形放大式胶体微喷系统的建模与实验

为实现微电子封装领域各类胶体的精确微量分配，设计了基于菱形放大机构放大压电致动器位移的微喷系统，利用集总参数法建立了该系统的等效电器模型，通过实验验证了模型和仿真结果的可靠性，分析了系统参数对胶滴体积和脱离效果的影响.实验和仿真表明:撞针位移在0.3~0.5 mm时为有利于喷射胶滴的范围内；针对3 Pa·s黏度的胶体，当驱动气压在0.15~0.32 MPa时，喷射体积与驱动气压成正相关趋势；随着黏度的增大，相同条件下可获取的胶滴体积不断减小，需要的驱动力不断增大；对于特定黏度的胶体，在合适气压范围内，调控分配频率可实现对微喷体积的调节. 

Modeling and Experiment on Piezostack-Driven Diamond Amplification Jetting System

In order to dispense liquids precisely in micro-electronic packaging field, a kind of piezostack-driven diamond amplification jetting system was designed, and an analogous electrical model of the system was constructed based on a lumped parameter method. Then, experiments were carried out to verify the model and its simulation result, and to analyze the effects of system parameters on droplet volume and formation. The results show that, the displacement of the needle can reach 0.3 to 0.5 mm, which is in a suitable range for jetting droplets. For 3 Pa·s viscous liquid, when the driven air-pressure ranges from 0.15 to 0.32 MPa, the droplet volume is positively related to the driven air-pressure. With the increase of viscosity, the droplet volume is reduced, but at the same time, larger driving force is required. The volume can be adjusted by controlling frequency when air-pressure is in a suitable range. The research is of great importance to guide the design of jetting valve and control the droplet disengaging and dispensing accuracy.