| 高密度氧化铟锡(ITO)靶材的制备研究 |
| |
| 引用本文： | 朱归胜,徐华蕊. 高密度氧化铟锡(ITO)靶材的制备研究[J]. 云南大学学报(自然科学版), 2007, 29(6): 601-606 |
| |
| 作者姓名： | 朱归胜 徐华蕊 |
| |
| 作者单位： | 桂林电子科技大学,信息材料科学与工程系,广西,桂林,541004 |
| |
| 基金项目： | 国家高技术研究发展计划(863计划)，广西自然科学基金 |
| |
| 摘 要： | 以水热合成的2种不同粒径(70±8)nm和(40±6)nm单分散ITO粉末为原料,对原料粉体粒径分布、冷等静压成型压力、烧结温度和时间等与靶材烧结密度之间的关系进行了研究.当2种粒径原料按7:3质量比混合均匀,成型压力为250MPa,成型坯体经1300℃预烧1.5h和在1400℃烧结1h后可以得到相对密度大于99%的高密度、高纯度ITO靶材.
|
| 关 键 词： | 高密度 ITO 靶材 制备 |
| 文章编号： | 0258-7970（2007）06-0601-06 |
| 修稿时间： | 2007-01-12 |
Study on the preparation of ITO ceramic target with high density |
| |
| ZHU Gui-sheng,XU Hua-rui. Study on the preparation of ITO ceramic target with high density[J]. Journal of Yunnan University(Natural Sciences), 2007, 29(6): 601-606 |
| |
| Authors: | ZHU Gui-sheng XU Hua-rui |
| |
| Affiliation: | Guilin University of Electronic Technology, Guilin 541004, China |
| |
| Abstract: | The indium tin oxide(ITO) ceramic target with high relative density was prepared by cold iso-static pressing and sinter at air atmosphere process,using the mono-dispersed ITO powders with two different particle size(70±8)nm and(40±6)nm which synthesized by resin-hydrothermal as raw materials.The factors among the particle size-distribution,pressure and sintering temperature etc which affected the density of ITO ceramic targethave been investigated.The ITO ceramic target could have get a relative density about 99.28% by means of which are mixed powder with 7:3 weight ratio and molded under 250MPa of CIP pressure and then sintered at the temperature of 1300℃ for 1.5 h and 1400℃ for 1 h. |
| |
| Keywords: | ITO |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《云南大学学报(自然科学版)》浏览原始摘要信息 |
|
点击此处可从《云南大学学报(自然科学版)》下载全文 |
