| 椭圆偏光测厚仪工作原理的探讨 |
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| 引用本文： | 胡承毅,郑炽甫,陈玉青. 椭圆偏光测厚仪工作原理的探讨[J]. 东华大学学报(自然科学版), 1986, 0(1) |
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| 作者姓名： | 胡承毅 郑炽甫 陈玉青 |
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| 作者单位： | 中国纺织大学物理教研室，中国纺织大学物理教研室，中国纺织大学物理教研室 |
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| 摘 要： | 本文采用振幅矢量法和复数法来研究椭圆偏光测厚仪的工作原理,并阐明使用该仪器时的数据处理根据和两次消光的条件。
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| 关 键 词： | 厚度测量 椭圆偏振光 振幅矢量 复数 |
A STUDY OF THE WORKING PRINGIPLES OF THE THICKNESS-MEASURING METER BY ELLIPTIGALLY POLARIZED LIGHT |
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| Hu Chengyi,Zheng Zhifu and Chen Yuqing. A STUDY OF THE WORKING PRINGIPLES OF THE THICKNESS-MEASURING METER BY ELLIPTIGALLY POLARIZED LIGHT[J]. Journal of Donghua University, 1986, 0(1) |
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| Authors: | Hu Chengyi Zheng Zhifu Chen Yuqing |
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| Abstract: | Amplitude vectors and complex numbers are employed in the research on the working principles of the thickness-measuring meter by elliptically polarized light. The paper expounds the data-processed basis and the conoitions of two times of lightelimination in using the meter. |
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| Keywords: | thickness-measuring elliptically polarized light amplitude vector complex numbers. |
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