基于傅里叶变换移相测量的相位测量轮廓术

移相误差是移相法相位测量轮廓术的主要误差来源，提出一种对实际步进移相值进行测量，消除移相误差对相位测量影响的算法，该算法将傅里叶变换相位测量和移相法相位测量相结合，利用傅里叶变换相位原理测量每次移相的实际相移量，然后根据相移实测值计算相位分布，进而获得物体表面蝗三维数据。该算法能够准确测量每步移相的实际相移量，不要求移相的均匀性和重复性，只需３帧图像就可解调出相位分布，不受移相误差的影响。仿真结果证实了该算法的有效性，实际图像数据处理结果表明，该算法可以基本消除由移相引起的误差。

Phase-Measuring Profilometry Based on Phase-Shift Measurement Using FFT

Phase shift error is the main source of phase measurement error in phase measuring profilometry(PMP). A method of measuring the accurate phase shift and eliminating the phase measurement error caused by phase shift error is proposed. The step phase shift between two frames can be calculated by using FFT based on the principle of Fourior transform profilometry (FTP). When the accurate phase shift is obtained, accurate phase measurement can be accomplished using only three frames. Thus, the error caused by phase shift inaccuracy is eliminated and the system measurement accuracy is improved. Simulations and experiment are carried out to verify its effectiveness. The results show that the method can accurately measure the phase shift and improve phase measurement accuracy.