| 溶胶-凝胶方法制备铁酸铋薄膜及膜厚的影响 |
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| 引用本文： | 俞圣雯,蔡金玉,严云飞,程晋荣.溶胶-凝胶方法制备铁酸铋薄膜及膜厚的影响[J].上海大学学报(自然科学版),2008,14(5):509-513. |
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| 作者姓名： | 俞圣雯 蔡金玉 严云飞 程晋荣 |
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| 作者单位： | 上海大学 材料科学与工程学院，上海 200072 |
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| 基金项目： | 上海大学优秀青年教师后备人选科研基金，上海市教委资助项目 |
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| 摘 要： | 以溶胶-凝胶方法制备不同厚度的铁酸铋(BiFeO3, BFO)薄膜，XRD分析表明，BFO薄膜呈钙钛矿相结构，且随着厚度的增加，薄膜的结晶性变好.而薄膜厚度为4层(200 nm)至8层(400nm)之间，其微观结构可能发生由赝立方相向三方相的转变.同时，随着膜厚的增加，BFO薄膜的介电性能得到改善，绝缘性能得到提高，铁电性能也相应地好转.
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| 关 键 词： | 薄膜 厚度
溶胶 凝胶 铁酸铋 |
| 收稿时间： | 2008-05-04 |
BiFeO3 Thin Films Fabricated by Sol-gel Method and Its Thickness Dependence |
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| YU Sheng-wen,CAI Jin-yu,YAN Yun-fei,CHENG Jin-rong.BiFeO3 Thin Films Fabricated by Sol-gel Method and Its Thickness Dependence[J].Journal of Shanghai University(Natural Science),2008,14(5):509-513. |
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| Authors: | YU Sheng-wen CAI Jin-yu YAN Yun-fei CHENG Jin-rong |
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| Institution: | School of Materials Science and Engineering, Shanghai University, Shanghai 200072, China |
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| Abstract: | BiFeO3 thin films with different layers/thicknesses were fabricated on Pt(111)/Si(100) substrates by sol-gel method. XRD results indicate that a phase transition from pseudo cubic to rhombohedral might happen between the films with thicknesses of 4 layers/200 nm and 8 layers/400 nm. With increasing thickness, the films exhibit better crystallinity and dielectric properties. Meanwhile, insulation and ferroelectricy are improved as well. |
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| Keywords: | film sol-gel thickness BiFeO3 |
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