| 脉冲约束刻蚀微加工理论探讨 |
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| 引用本文： | 孙建军. 脉冲约束刻蚀微加工理论探讨[J]. 河南师范大学学报(自然科学版), 2003, 31(2): 34-39 |
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| 作者姓名： | 孙建军 |
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| 作者单位： | 河南师范大学物理与信息工程学院,河南,新乡,453002 |
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| 基金项目： | 国家自然科学基金 ( 60 0 760 0 2 ) |
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| 摘 要： | 本提出了脉冲约束刻蚀电化学微加工方法，从半无限和有限扩散脉冲约束刻蚀两个模型出发，从理论上探讨了它的可行性．
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| 关 键 词： | 电化学 微加工 脉冲 约束 |
| 文章编号： | 1000-2367(2003)02-0034-06 |
| 修稿时间： | 2003-03-07 |
Theoretical Study on the Electrochemical Micromachining by Pulse Confined Etching |
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| SUN Jian-jun. Theoretical Study on the Electrochemical Micromachining by Pulse Confined Etching[J]. Journal of Henan Normal University(Natural Science), 2003, 31(2): 34-39 |
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| Authors: | SUN Jian-jun |
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| Abstract: | An electrochemical micromachining method was supposed based on the pulse confined etchant layer. Its feasibility was discussed through two models of semi-infinit and finit pulse confined etchant layer. |
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| Keywords: | electrochemistry micromachining pulse confined etching |
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