静电悬浮微硅陀螺的空气阻尼特性

为保证静电悬浮微陀螺在工作状态下具有期望的动态特性,需要得到微陀螺六自由度运动的空气阻尼模型。根据流体力学和分子动力学的基本理论,在考虑空气流动状态、温度和气膜可压缩性的基础上,构建了描述微陀螺压膜阻尼特性的Reynolds方程,以及描述滑膜阻尼特性的Couette流模型。将微陀螺表头内部气膜分成了8个区,推导了气膜在大间隙振动、径向摆动和轴向旋转时的气膜阻尼系数。根据微陀螺的结构参数进行气膜阻尼仿真,结果表明:轴向压膜阻尼对微陀螺支承系统的动态特性影响最大,气膜间隙-气膜阻尼系数曲线呈抛物线型,气膜阻尼系数随温度呈线性变化。

Gas damping of an electrostatically levitated micro-silicon gyroscope

A six-DOF gas damping model was developed for an electrostatically levitated micro gyroscope using fluid mechanics and molecular dynamics models to obtain the dynamic characteristics for various working conditions.A linearized Reynolds equation was used to describe the squeeze film damping with a Couette model to describe the slide film damping with the gas flow,temperature variations and compressibility.The interior chamber gas film was subdivided into eight ring-shaped zones with translational damping coefficients at large magnitudes,radial vibration damping coefficients at small angles,and axial rotation damping coefficients for the rotator.Simulations show that the z-axis squeeze film damping has a dominant effect on the gyroscope levitation,with gas damping coefficients proportional to the second power of the gas film thickness and linearly related to the gas temperatures.