| 多孔薄膜中杂质浓度分布的理论分析 |
| |
| 引用本文： | 彭德应,王世涛. 多孔薄膜中杂质浓度分布的理论分析[J]. 辽宁大学学报(自然科学版), 2003, 30(2): 123-126 |
| |
| 作者姓名： | 彭德应 王世涛 |
| |
| 作者单位： | 华东师范大学物理系,上海市,200062 |
| |
| 摘 要： | 论述了杂质渗入到多孔薄膜后，薄膜中的杂质浓度分布的理论解释，给出了对实际工艺的指导性结论。
|
| 关 键 词： | 多孔薄膜 杂质 浓度分布 薄膜渗透工艺 扩散作用 扩散方程 |
| 文章编号： | 1000-5846(2003)02-0123-04 |
| 修稿时间： | 2003-01-07 |
Theoretical Analysis of the Concentration Distribution of Extrinsic Material in Thin Film with Multiple Holes |
| |
| PENG De-ying,WANG Shi-tao. Theoretical Analysis of the Concentration Distribution of Extrinsic Material in Thin Film with Multiple Holes[J]. Journal of Liaoning University(Natural Sciences Edition), 2003, 30(2): 123-126 |
| |
| Authors: | PENG De-ying WANG Shi-tao |
| |
| Abstract: | In this paper, we discussed the concentration distribution of extrinsic materials in the thin film with multiple holes, and gave its particular application. |
| |
| Keywords: | extrinsic material thin film concentration distribution. |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
