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Al基底SS-AlN吸收层实验优化研究
引用本文:陈智平,吴沫萱,李明,季旭,罗熙.Al基底SS-AlN吸收层实验优化研究[J].云南师范大学学报(自然科学版),2013(4):20-24.
作者姓名:陈智平  吴沫萱  李明  季旭  罗熙
作者单位:云南师范大学太阳能研究所,云南昆明650092
基金项目:国家自然科学基金云南联合基金重点资助项目(U1137605);国家国际科技合作资助项目(2011DFA60460);教育部长江学者和创新团队发展计划资助项目(20095303110001).
摘    要:利用磁控溅射设备制备了SS-AlN太阳光谱选择性吸收膜,用分光光度计测量样品的光谱反射曲线并与模拟计算所得到的反射曲线进行对比。结果表明:理论模拟曲线与实际测量虽不完全吻合,但其吸收率基本相同。实验测得的用脉冲磁控溅射设备的单层吸收膜吸收率α=90.81%,理论值为92.65%.可见,模拟分析能有效地预测SS-AlN膜层的光学性能。

关 键 词:SS-AlN太阳光谱选择性吸收涂层  吸收率  反射率  磁控溅射

Characteristic and Optimization of the Absorption Layer SS-AIN Plated on the Al Substrate
CHEN Zhi-ping,WU Mo-xuan,LIMing,JI Xu,LUO Xi.Characteristic and Optimization of the Absorption Layer SS-AIN Plated on the Al Substrate[J].Journal of Yunnan Normal University (Natural Sciences Edition),2013(4):20-24.
Authors:CHEN Zhi-ping  WU Mo-xuan  LIMing  JI Xu  LUO Xi
Institution:(Solar Energy Research Institute, Yunnan Normal University,Kunming 650092, China)
Abstract:SS-AlN solar spectrum selective absorbing film has been produced by pulsed magnetron sputtering equipment and DC magnetron sputtering device in this paper, the sample was measured using a spectrophotometer and the spectral reflectance curves obtained with simulated reflection curves were compared. The results showed that though the theoretical simulation curve and the actual measurement not completely consistent; the absorption rate was basically the same. The measured pulse magnetron sputtering apparatus of a single-layer film absorption absorption ratio was 90. 81%, theoretical value was 92.65%. Visible, simulation could effectively predict SS-AlN film optical properties.
Keywords:SS-AlN solar spectrum selective absorbing coating  Absorption rate  Reflectivity  Magnetron sputtering
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