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自适应原则在激光准直仪中的应用
引用本文:郭继华,成相印,殷纯永.自适应原则在激光准直仪中的应用[J].清华大学学报(自然科学版),1997(6).
作者姓名:郭继华  成相印  殷纯永
作者单位:清华大学现代应用物理系,清华大学精密仪器与机械学系
摘    要:介绍了根据光学自适应原则设计的外差自适应激光准直系统。包括确定主要噪声因子以及对主要噪声因子实现光学自适应设计。该光学系统可以自动消除由于光束平移和角漂对测量产生的误差。同时允许在测量过程中将测量元件移出光路之外,因此可以用于同轴度测量。实验表明:该系统比其它准直仪具有更高的分辨率和稳定性。与HP公司双频激光准直仪相比具有相同的分辨率和稳定性,而没有近程死区,实现了状态测量,具有广泛的应用范围。该系统的设计表明:光学自适应原则对精密仪器的设计是非常有效的

关 键 词:自适应原则  直线度  准直

Application of adaptive principle on laser straightness systems
Abstract:A heterodyne laser straightness system based on adaptive principle is reported. The main noise factor of conventional measuring system is analyzed. The adaptive design for main noise factor is discussed. The optical system can automatically correct the error resulted from the drift of light beam. On the other hand, if the sensor is removed from beam path temporarily during measurements, the result will not be changed. The experiments show that the sensitivity and stability of this system are as good as those of Zeeman laser straightness system of HP Company. However, our system has no near dead range and can be used for coaxality of mechanical structure. The design of this system shows that the adaptive principle is very useful for precision measurement systems.
Keywords:adaptive principle  straightness  alignment
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