| 基于AlN/LiNbO3/diamond叠层结构的声表面波传播特性 |
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| 引用本文： | 周长见,杨轶,束逸,任天令.基于AlN/LiNbO3/diamond叠层结构的声表面波传播特性[J].清华大学学报(自然科学版),2012(4):544-549. |
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| 作者姓名： | 周长见 杨轶 束逸 任天令 |
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| 作者单位： | 清华大学微电子学研究所 |
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| 基金项目： | 国家自然科学基金资助项目(61025021,60936002,61020106006);国家重大科技专项(2009ZX02023-001-32011ZX02403-002) |
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| 摘 要： | 金刚石材料具有最高的声速,与压电薄膜相结合可获得高声速的声表面波器件。该文以改进的传输矩阵计算方法系统研究了12种不同边界条件下AlN/LiNbO3/diamond叠层结构的声表面波波速和耦合系数与AlN和LiNbO3厚度的关系。结果表明:AlN/LiNbO3/diamond的一阶声表面波在一定范围内可保持约9km/s的波速而不随LiNbO3和AlN的厚度而变化;其中4种结构的一阶声表面波耦合系数均可达到8%以上,且可在多种厚度组合下获得。结果显示:AlN/LiNbO3/diamond叠层结构兼具AlN/diamond结构的高声速和LiNbO3/diamond结构高耦合系数的特点,而其一阶波模的稳定波速的特点可克服现有AlN/diamond和LiNbO3/diamond结构的波速与膜厚强关联的缺点,在未来的高频率、高速率无线通信系统中具有潜在的应用价值。
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| 关 键 词： | 声表面波 AlN LiNbO3 金刚石薄膜 传输矩阵法 |
Surface acoustic wave characteristics on an AlN/LiNbO3/diamond layered structure |
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| ZHOU Changjian,YANG Yi,SHU Yi,REN Tianling.Surface acoustic wave characteristics on an AlN/LiNbO3/diamond layered structure[J].Journal of Tsinghua University(Science and Technology),2012(4):544-549. |
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| Authors: | ZHOU Changjian YANG Yi SHU Yi REN Tianling |
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| Institution: | (Institute of Microelectronics,Tsinghua University, Beijing 100084,China) |
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| Abstract: | Diamond has the highest acoustic wave velocity;thus a high-velocity surface acoustic wave(SAW) device should be achievable using a layered combing piezoelectric film on diamond.This study investigates the SAW propagation properties of AlN/ LiNbO3/diamond layered structures for 12 different boundary conditions using a modified transfer matrix method.The results show that the wave velocity of the first wave mode SAW with a high velocity of about 9km/s shows only weak dependence on the AlN and LiNbO3 film thicknesses.A high coupling coefficient of 8% can be obtained for four of the twelve conditions.This AlN/LiNbO3/diamond layered structure is very suitable for SAW devices for high-frequency high-throughput wireless communication applications due to its unique SAW properties. |
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| Keywords: | surface acoustic wave AlN LiNbO3 diamond film transfer matrix method |
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