应用于微结构制造自治系统的流程自动生成

本文介绍计算机自动生成微结构制造流程的技术。微结构器件的种类繁多,不同器件的加工特点都不相同,即以中等复杂程度的CMOS结构而言,其制造流程就达到了几百个步骤之多,因此流程的生成技术是极具挑战性的。一个适用流程可按由简入繁的过程逐步形成。本文首先介绍了根据器件结构的特点,确定单元加工顺序的优先级方案;在单元加工顺序确定后,参照本文所定义的一个原型工艺库,可以将对单元的加工处理展开成局部的工艺步骤串;工艺步骤串连缀而成的初始工艺流程,经过一定的优化与适配工艺条件的之后,产生出在实践中能够直接使用的、详细的工艺流程卡。

Automatically Generating Process Flows for An Electronic Manufacturing Automation System

Techniques for a computer to automatically generate microstructure process flows are presented.Different microstructure devices are processed through different ways,and each of these ways contains,for example for a CMOS structure of moderate complexity,over a hundred process steps.Generally speaking,the researches on process flow generating techniques are quite difficult.A feasible process flow is suggested to be generated step by step.At first,the structure cell fabricating sequence can be determined by taking some priority rules into consideration.Each step in the sequence can then be expanded according to the definitions that are pre-stored in a proto type process library.The initial process flow is formed after connecting these expanded steps into a whole.The detailed process flow card,which can be adopted directly in practice,is finally generated after optimizing and setting process parameters for each step in the initial flow.