| 激光诱导聚酰亚胺上化学沉积金 |
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| 引用本文： | 王建,赵国庆.激光诱导聚酰亚胺上化学沉积金[J].复旦学报(自然科学版),1998,37(3):248-252. |
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| 作者姓名： | 王建 赵国庆 |
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| 作者单位： | [1]复旦大学化学系 [2]复旦大学近代物理研究所 |
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| 摘 要： | 利用固相激光诱导化学沉积技术在聚酰亚胺（ＰＩ）基板上实现了金的无掩模局部沉积，也研究了该沉积镀层的形态和组成。研究表明，在激光作用下，产生了热分解的反应，高温反应使镀层和基体发生了“熔合”，且由此形成的金线电阻率低，选择性好。
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| 关 键 词： | 激光诱导 聚酰亚胺 化学沉积 金 镀层 |
Laser-initiated Electroless Deposition of Gold on Polyimide |
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| Wang Jian, Ye Yunfen, Cui Qiming, Yu Zuzhan.Laser-initiated Electroless Deposition of Gold on Polyimide[J].Journal of Fudan University(Natural Science),1998,37(3):248-252. |
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| Authors: | Wang Jian Ye Yunfen Cui Qiming Yu Zuzhan |
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| Institution: | Wang Jian; Ye Yunfen; Cui Qiming; Yu Zuzhan (Department of Chemistry) Zhao Guoqing (Institute of Moder Physics) |
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| Abstract: | Maskless selective deposition of Gold on polyimide has been achieved using laser initiated deposition technique. The form and composition of the deposits are investigated, which shows that under the action of laser, a thermal decomposition takes place, the high temperature reaction makes the deposit diffuse into the substrate, resulting that the formed the gold feature has good selectivity and low resistivity. |
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| Keywords: | laser-initiated selective deposition polyimide |
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