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应用光伏方法测定P型半导体表面性质
引用本文:颜永美.应用光伏方法测定P型半导体表面性质[J].厦门大学学报(自然科学版),1990,29(4):400-405.
作者姓名:颜永美
作者单位:厦门大学物理学系
摘    要:本文报道了应用变温光伏方法对半导体表面能级,表面态密度的非破坏性测量原理。通过一定的模型简化,将Shockly-Read体复合理论应用于表面,建立起P型半导体表面态对少子电子的俘获截面估算公式。并以P型Si单晶样品进行验证,所得结果同有关报道一致。

关 键 词:光伏方法  P型半导体  表面性质  测定

Measure Surface Quality of P Type Semiconductors by Photovoltaic Method
Yan Yongmei Dept. of Phys..Measure Surface Quality of P Type Semiconductors by Photovoltaic Method[J].Journal of Xiamen University(Natural Science),1990,29(4):400-405.
Authors:Yan Yongmei Dept of Phys
Institution:Yan Yongmei Dept. of Phys.
Abstract:The measured undestructivly theory for the surface energy level and the surface state density of semiconductors fay the method of photovoltages at changed temperatures is reported. The Shockly-Read bulk recombination theory is applied to surface, thereby a formula mated cross section to trap electron for the surface state of P type semiconductors is established, in terms of certain reducing model. The theory is also verifed with the specimens type Si single crystal. The results consist with the reports of related literature.
Keywords:Method of photovoltages at changed temperatures  P type semiconductors  Surface quality
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