ZrC／ZrB2纳米多层膜的结构和机械性能研究

选择ZrC和ZrB2作为个体层材料．利用超高真空射频磁控溅射系统，在室温条件下制备了ZrC，ZrB2及一系列具有纳米尺寸的ZrC／ZrB2多层薄膜．通过XRD，SEM和表面轮廓仪以及纳米力学测试系统，分析了调制周期和工作气压对多层膜生长结构和力学性能的影响．结果表明：多层膜的界面清晰，调制周期性较好，大部分多层膜的纳米硬度和弹性模量值都高于两种个体材料混合相的值，在调制周期为27．5nm，气压为0．8Pa时，多层膜体系的硬度、应力以及弹性模量值均达到最佳，多层膜机械性能改善明显与其调制层结构和工作气压相关．

On structures and mechanical properties of nanoscale ZrC/ZrB2 multilayered films

A series of ZrC/ZrB2. multilayered films with the size of nanometer are prepared with ZrC and ZrB2 as individual layered materials by using ultra-high vacuum radio freqency magnetron sputter system at room temperature. The influence of modulation period and working pressure on structures and mechanical properties of the ZrC/ZrB2 multilayered films are analyzed by using XRD, SEM, profiler and nano indenter. The results show that the surface of multilayered films is sharp, the modulation periodicity is good and most multilayered films exhibit higher nanohardness and elastic modulus than the rule-of-mixture value of monolithic ZrC and ZrB2 films. With the working pressure of 0.8 Pa and modulation period of 27.5 nm, the multilayered films possess excellent hardness, internal stress and elastic modulus. The enhanced mechanical properties are related to the modulated structure and the working pressure.