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氮化碳薄膜的应用研究
引用本文:刘广为,翟厚明,冯煜东.氮化碳薄膜的应用研究[J].兰州大学学报(自然科学版),2004,40(3):26-29.
作者姓名:刘广为  翟厚明  冯煜东
作者单位:1. 甘肃广播电视大学,开放教育学院,甘肃,兰州,730000
2. 兰州大学,物理科学与技术学院,甘肃,兰州,730000
3. 兰州物理研究所,甘肃,兰州,730000
摘    要:探讨了氮化碳(CNx)薄膜在空间领域中的应用.用电子束蒸发离子束辅助沉积的方法制备的氮化碳薄膜,对其结构和成分进行了分析,并用地面模拟设备进行了耐原子氧腐蚀和防冷焊试验,结果表明氮化碳薄膜具有较好的防冷焊性能,掺有Ti和Sn的碳氮膜具有很好的防原子氧性能.

关 键 词:氮化碳  结构  成分  原子氧  冷焊
文章编号:0455-2059(2004)03-0026-04

A study of the applications of carbon nitride films
LIU guang-wei,ZHAI hou-ming,FENG yu-dong.A study of the applications of carbon nitride films[J].Journal of Lanzhou University(Natural Science),2004,40(3):26-29.
Authors:LIU guang-wei  ZHAI hou-ming  FENG yu-dong
Abstract:The possibility of carbon nitride films being used in space fields was discussed in this paper. The structure and chemical components of carbon nitride films prepared through electron-gun evaporation of high purity graphite assisted by bombardment of nitrogen ion-beam were analyzed. The experiments result of atomic oxygen action and cold welding with ground simulation devices proved that the films have good anti-cold welding properties and that the films containing the Tin and Titanium have good anti-atomic oxygen properties as well.
Keywords:carbon nitride  structure  chemical component  atomic oxygen  cold welding
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