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Mechanical Properties of Laterally Driven Microresonance with a One-Side Straight-Leg Suspension
引用本文:沈雪瑾 陈晓阳. Mechanical Properties of Laterally Driven Microresonance with a One-Side Straight-Leg Suspension[J]. 清华大学学报, 2004, 9(3): 294-298
作者姓名:沈雪瑾 陈晓阳
作者单位:DepartmentofMechanicalAutomation,ShanghaiUniversity,Shanghai200072,China
基金项目:Supported by the National Natural Science Foundation of China ( No. 50135040 ),the Science Foundation of Shanghai Municipal Bureau for Key Discipline (No. 970104),the Sci-ence and Technology Development Foundation of Shanghai (No. 0111nm020),and th
摘    要:The mechanical properties of lateral polysilicon comb-driven microresonators suspended from one-side straight-leg beams, which are widely used in linear microvibromotors, are investigated in this paper.The lateral vibration of the microresonator was modeled assuming that the symmetry of the microstructures and the applied loads are different. Methods were given to calculate the stress, lateral displacement, spring coefficient, and resonant frequency. The results show that the simple mechanical model is a superfluous system with three unknown variables. The results differ from pervious results for a microresonator suspended from double-side straight-leg beams, which has been commonly used to design linear microvibromotors.

关 键 词:侧向驱动微共鸣器 单边挠性悬浮 机械性质 机械模型 谐振频率

Mechanical Properties of Laterally Driven Microresonance with a One-Side Straight-Leg Suspension
SHEN Xuejin ,CHEN Xiaoyang. Mechanical Properties of Laterally Driven Microresonance with a One-Side Straight-Leg Suspension[J]. Tsinghua Science and Technology, 2004, 9(3): 294-298
Authors:SHEN Xuejin   CHEN Xiaoyang
Affiliation:SHEN Xuejin **,CHEN Xiaoyang Department of Mechanical Automation,Shanghai University,Shanghai 200072,China
Abstract:The mechanical properties of lateral polysilicon comb-driven microresonators suspended from one-side straight-leg beams, which are widely used in linear microvibromotors, are investigated in this paper. The lateral vibration of the microresonator was modeled assuming that the symmetry of the microstructures and the applied loads are different. Methods were given to calculate the stress, lateral displacement, spring coefficient, and resonant frequency. The results show that the simple mechanical model is a superfluous system with three unknown variables. The results differ from pervious results for a microresonator suspended from double-side straight-leg beams, which has been commonly used to design linear microvibromotors.
Keywords:mechanical properties  laterally driven microresonator  one-side flexural suspension
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