| Mechanical Properties of Laterally Driven Microresonance with a One-Side Straight-Leg Suspension |
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| 引用本文： | 沈雪瑾 陈晓阳. Mechanical Properties of Laterally Driven Microresonance with a One-Side Straight-Leg Suspension[J]. 清华大学学报, 2004, 9(3): 294-298 |
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| 作者姓名： | 沈雪瑾 陈晓阳 |
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| 作者单位： | DepartmentofMechanicalAutomation,ShanghaiUniversity,Shanghai200072,China |
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| 基金项目： | Supported by the National Natural Science Foundation of China ( No. 50135040 )，the Science Foundation of Shanghai Municipal Bureau for Key Discipline (No. 970104)，the Sci-ence and Technology Development Foundation of Shanghai (No. 0111nm020)，and th |
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| 摘 要： | The mechanical properties of lateral polysilicon comb-driven microresonators suspended from one-side straight-leg beams, which are widely used in linear microvibromotors, are investigated in this paper.The lateral vibration of the microresonator was modeled assuming that the symmetry of the microstructures and the applied loads are different. Methods were given to calculate the stress, lateral displacement, spring coefficient, and resonant frequency. The results show that the simple mechanical model is a superfluous system with three unknown variables. The results differ from pervious results for a microresonator suspended from double-side straight-leg beams, which has been commonly used to design linear microvibromotors.
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| 关 键 词： | 侧向驱动微共鸣器 单边挠性悬浮 机械性质 机械模型 谐振频率 |
Mechanical Properties of Laterally Driven Microresonance with a One-Side Straight-Leg Suspension |
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| SHEN Xuejin ,CHEN Xiaoyang. Mechanical Properties of Laterally Driven Microresonance with a One-Side Straight-Leg Suspension[J]. Tsinghua Science and Technology, 2004, 9(3): 294-298 |
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| Authors: | SHEN Xuejin CHEN Xiaoyang |
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| Affiliation: | SHEN Xuejin **,CHEN Xiaoyang Department of Mechanical Automation,Shanghai University,Shanghai 200072,China |
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| Abstract: | The mechanical properties of lateral polysilicon comb-driven microresonators suspended from one-side straight-leg beams, which are widely used in linear microvibromotors, are investigated in this paper. The lateral vibration of the microresonator was modeled assuming that the symmetry of the microstructures and the applied loads are different. Methods were given to calculate the stress, lateral displacement, spring coefficient, and resonant frequency. The results show that the simple mechanical model is a superfluous system with three unknown variables. The results differ from pervious results for a microresonator suspended from double-side straight-leg beams, which has been commonly used to design linear microvibromotors. |
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| Keywords: | mechanical properties laterally driven microresonator one-side flexural suspension |
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