Aging effect of Co/C soft X-ray multilayer mirrors |
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| Authors: | Haili Bai Enyong Jiang Renyu Tian Cunda Wang |
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| Affiliation: | (1) Department of Applied Physics, Tianjin University, 300072 Tianjin, China |
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| Abstract: | Conclusion We have investigated the aging effect of Co/C soft X-ray multilayers prepared by dualfacing-target sputtering. It was found that phase-separation phenomena exist in the Co/C multilayers, which causes the reflectivity at grazing incidence to increase with time, and can be interpreted as positive enthalpy of Co-C mixing. It is evident that oxidation of the outermost layer of Co/C multilayers with Co deposited last is a potential problem in applications where the highest possible reflectivity is required. |
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| Keywords: | soft X-ray multilayers aging effect enthalpy of mixing |
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