| 朗谬尔探针用于VAC等离子体诊断的初步研究 |
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| 引用本文： | 程仲元,邹积岩.朗谬尔探针用于VAC等离子体诊断的初步研究[J].应用科学学报,1996,14(4):475-480. |
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| 作者姓名： | 程仲元 邹积岩 |
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| 作者单位： | 华中理工大学 |
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| 摘 要： | 简要分析了朗谬尔探针用于真空电弧镀膜等离子体诊断的可行性及理论适用性问题。介绍了一种可用于ＶＡＣ等离子体在线监测的探针诊断系统，并利用此系统分析了不同工艺参数一等离子体参数的变化。
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| 关 键 词： | 等离子体诊断 朗谬尔探针 真空电弧镀膜 |
LANGMUIR PROBE AS A DIAGNOSTIC TOOL FOR PLASMA IN VACUUM ARC COATING(VAC) PROCESSES |
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| OHENG ZHONGYUAN,ZOU JIYAN, YANG LEI,ZHANG HANMING.LANGMUIR PROBE AS A DIAGNOSTIC TOOL FOR PLASMA IN VACUUM ARC COATING(VAC) PROCESSES[J].Journal of Applied Sciences,1996,14(4):475-480. |
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| Authors: | OHENG ZHONGYUAN ZOU JIYAN YANG LEI ZHANG HANMING |
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| Institution: | Huazhong University of Science and Technology |
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| Abstract: | This paper discusses the feasibility of using the Langumir probe as adiagnostic tool for plasma in Vacuum Arc Coating (VAC) processes, and thevalidity of probe theories in this situation. A system has been set up for the insitu diagnesis of VAC plasma. Plasma parametere have been diagnosed nudervarious process parameters. |
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| Keywords: | plasma diagnosis Langmuir probe vacuum are coating |
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