| 空气环境下制备相变特性VO_2薄膜 |
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| 引用本文： | 刘洋,徐晓峰. 空气环境下制备相变特性VO_2薄膜[J]. 东华大学学报(自然科学版), 2009, 35(6) |
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| 作者姓名： | 刘洋 徐晓峰 |
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| 作者单位： | 东华大学理学院,上海,201620 |
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| 摘 要： | 提出了一种制备相变特性VO_2薄膜的简易方法.将制备好的金属钒薄膜置于440℃空气下氧化处理,获得相变温度为60℃的单斜VO_2薄膜,薄膜方块电阻值在60～85℃范围内变化量达2.2个数量级.X射线衍射分析(XRD)表明薄膜的主要成分为单斜相VO_2.探索了此工艺的一般性规律,分析高价态钒对薄膜相变的影响.
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| 关 键 词： | VO_2薄膜 相变 空气环境 氧化 方块电阻 |
The Fabrication of Phase Transition Characteristic VO_2 Thin Films in Air Atmosphere |
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| LIU Yang,XU Xiao-feng. The Fabrication of Phase Transition Characteristic VO_2 Thin Films in Air Atmosphere[J]. Journal of Donghua University, 2009, 35(6) |
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| Authors: | LIU Yang XU Xiao-feng |
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| Affiliation: | LIU Yang,XU Xiao-feng(College of Science,Donghua University,Shanghai 201620,China) |
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| Abstract: | A simple method on the fabrication of phase transition characteristic VO_2 thin films was presented Monoclinic VO_2 film which phase change at 60 ℃ was obtained by treating V-metal films in air atmosphere at 440 ℃.The prepared samples exhibited an 2.2 order change on square resistance from 60 ℃ to 85 ℃.X-ray diffraction (XRD) showed the chief constituent in film was polycrystalline monoclinic phase VO_2.The universal rule of the technique was studied and the influence of the high-valence V to the phase transition characteristic in the films were also discussed. |
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| Keywords: | VO_2 thin films phase transition air atmosphere oxidation square resistance |
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