| 离子束轰击对SnO2超微粒子薄膜性质的影响 |
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| 引用本文： | 际慧,陆元成.离子束轰击对SnO2超微粒子薄膜性质的影响[J].华东理工大学学报(自然科学版),1994,20(5):693-697. |
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| 作者姓名： | 际慧 陆元成 |
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| 作者单位： | 华东理工大学基础教育学院，华东理工大学物理系 |
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| 摘 要： | 采用直流气放电活化反应蒸发法，沉积成ＳｎＯ２超微粒子薄膜。以不同能量的离子束轰击薄膜表面，用扫描电子显微镜、俄歇电子能谱仪等，分析了离子束作用对ＳｎＯ２ＵＰＦ表面形貌和化学组成的影响，同时研究了离子束作用前后，ＳｎＯ２ＵＰＦ对乙醇的气敏性质的变化。
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| 关 键 词： | 离子束 氧化锡 超微粒子 薄膜 |
Influence of Iron Beam Bombardment on the Properties of SnO_2 Ultrafine Particle Films |
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| Lu Hui.Influence of Iron Beam Bombardment on the Properties of SnO_2 Ultrafine Particle Films[J].Journal of East China University of Science and Technology,1994,20(5):693-697. |
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| Authors: | Lu Hui |
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| Abstract: | SnO_2 ultrafine particle films were deposited by d.c. gas discharge activating reaction evaporation. The ion beams with various energy were used to bombard the SnO_2 UPF.Influence of ion beam bombardment on the SnO_2 UPF surface morphology and chemical composition was analysed by SEM and AES. The gas sensing properties of SnO_2 UPF to C_2H_5OH gas before and after being bombarded were also studied. |
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| Keywords: | ion beam tin oxide morphology sensitivity ultrafine particle films |
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