| 测定薄膜厚度的基片X射线衍射法 |
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| 引用本文： | 姜传海,程凡雄,吴建生. 测定薄膜厚度的基片X射线衍射法[J]. 上海交通大学学报, 2004, 38(7): 1045-1047 |
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| 作者姓名： | 姜传海 程凡雄 吴建生 |
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| 作者单位： | 上海交通大学,材料科学与工程学院,高温材料及高温测试教育部开放实验室,上海,200030 |
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| 基金项目： | 国家自然科学基金资助项目 ( 5 0 13 10 3 0 )，上海应用材料研究与发展基金 ( 0 2 11) |
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| 摘 要： | 基于X射线衍射与吸收理论，建立了一种薄膜厚度测量方法，即基片多级衍射法．利用X射线衍射仪测量高速钢表面的TiN薄膜厚度，由于膜下基片的衍射强度较高及衍射峰形良好，可以确保薄膜厚度的测量精度．本法克服了非晶薄膜材料中薄膜衍射信息较差以及存在织构等不利因素所导致测量结果不可靠等问题．
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| 关 键 词： | 薄膜材料 X射线衍射 薄膜厚度 |
| 文章编号： | 1006-2467(2004)07-1045-03 |
| 修稿时间： | 2003-05-15 |
A Method of the X-ray Diffraction of Substrate for Measuring Films Thickness |
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| JIANG Chuan-hai,CHENG Fan-xiong,WU Jian-sheng. A Method of the X-ray Diffraction of Substrate for Measuring Films Thickness[J]. Journal of Shanghai Jiaotong University, 2004, 38(7): 1045-1047 |
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| Authors: | JIANG Chuan-hai CHENG Fan-xiong WU Jian-sheng |
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| Abstract: | Based on the theory of X-ray diffraction and absorption, a method of the multi-order diffraction of substrate was established to measure the thickness of thin film. By using X-ray diffractometer, the thickness of TiN thin film on a high-speed steel was measured. It was found that due to the substrate's high diffraction intensity and good diffraction profile, the thickness of thin film of the TiN can be measured accurately. By using this method, poor measuring results due to the diffraction profile of amorphous and texture of film can be improved. |
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| Keywords: | film material X-ray diffraction film thickness |
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