| AZO薄膜的光学性质研究 |
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| 引用本文： | 李丽,刘素芳,江莎,刘子贻. AZO薄膜的光学性质研究[J]. 重庆邮电大学学报(自然科学版), 2009, 21(6): 781-784 |
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| 作者姓名： | 李丽 刘素芳 江莎 刘子贻 |
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| 作者单位： | 重庆邮电大学,数理学院,重庆,400065;郑州铁路职业技术学院,信息工程系,河南,郑州,450052;重庆邮电大学,光电工程学院,重庆,400065 |
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| 基金项目： | 重庆邮电大学青年教师科技基金项目资助，重庆市教委科学技术研究项目资助 |
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| 摘 要： | 采用直流反应磁控溅射法,用Zn(99.99%)掺 Al(1.5%)靶制备出高质量的Al掺杂的ZnO(AZO)薄膜,用紫外可见、红外分光光度计等测试手段对沉积的薄膜进行了表征和分析,并对AZO薄膜的折射率和厚度进行了理论分析.薄膜的光谱分析结果表明:薄膜样品的可见光透射率平均值均在80%以上.AZO薄膜在紫外有很强的吸收峰,在红外区域,其反射率可达70%.通过理论计算得出了AZO薄膜样品的厚度为101 nm,与台阶仪测量的结果基本相符.
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| 关 键 词： | AZO薄膜 光学性质 透射光谱 |
| 收稿时间： | 2009-05-19 |
Optical property of Al doped ZnO thin films |
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| LI Li,LIU Su-fang,JIANG Sh,LIU Zi-Yi. Optical property of Al doped ZnO thin films[J]. Journal of Chongqing University of Posts and Telecommunications, 2009, 21(6): 781-784 |
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| Authors: | LI Li LIU Su-fang JIANG Sh LIU Zi-Yi |
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| Affiliation: | College of Mathematics and Physics, Chongqing University of Posts and Telecommunications, Chongqing 400065, P. R. China |
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| Abstract: | In this paper, high quality of AZO thin films were prepared by direct current (DC) reactive magnetron sputtering using a Zn target (99.99%) containing Al of 1.5%. The obtained films were characterized and analyzed by ultraviolet-visible and infrared light spectrophotometer. The refractive index and thickness of AZO thin films were theoretically analyzed. The spectral measurements of the films indicate that the average value of the optical transmittance of the films in the visible region exceeds 80%. There is a strong absorption of AZO thin films in the ultraviolet region. The reflectance of AZO thin films in the infrared region is up to 70%. The thickness of AZO thin films is 101 nm, which coincides with the measurement results of step profiler. |
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| Keywords: | Al-doped ZnO (AZO) thin films optical property transmittance spectra |
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