| 热解CVD法同质外延金刚石单晶的研究 |
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| 引用本文： | 李胜华,张志明,荘志诚. 热解CVD法同质外延金刚石单晶的研究[J]. 上海交通大学学报, 1992, 0(3) |
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| 作者姓名： | 李胜华 张志明 荘志诚 |
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| 作者单位： | 上海交通大学理化中心(李胜华)，上海交通大学应用化学系(张志明)，上海交通大学理化中心(荘志诚) |
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| 基金项目： | 国家高技术和国家自然科学基金 |
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| 摘 要： | 以有机低分子化合物丙酮与氢气为反应气体,用热解CVD 法在形状不规则的金刚石小颗粒上,外延出规整的立方八面体单晶金刚石颗粒,表面呈三角形或截角三角形形状,经反射高能电子衍射结构分析,确认是单晶。文中还讨论了金刚石结构中{111}面最容易显露的实验结果.
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| 关 键 词： | 单晶金刚石颗粒 同质外延 |
A Study on Homoepitaxial Single Crystal Diamond by Thermal CVD |
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| Li Shenghua Zhang Zhiming Zhuang Zhicheng. A Study on Homoepitaxial Single Crystal Diamond by Thermal CVD[J]. Journal of Shanghai Jiaotong University, 1992, 0(3) |
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| Authors: | Li Shenghua Zhang Zhiming Zhuang Zhicheng |
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| Affiliation: | Li Shenghua Zhang Zhiming Zhuang Zhicheng |
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| Abstract: | The cubit-eight plane diamond epitaxial particle with a triangle surfaceor with its angles cut off can be grown on random diamond particles by means ofhot-filament assisted chemical-vapor-deposition(CVD),using acetone and hyd-rogen as reation gases.The epitaxial particle has been confirmed to be a singlecrystal diamond by RHEED.(111)plane of diamond particles is easily exposedduring the deposition and the experimental results will be discussed in this paper. |
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| Keywords: | single crystal diamond homoepitaxial thermal CVD |
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