| 氦离子轰击器壁的再释和溅射脱附效应研究 |
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| 引用本文： | 王志文. 氦离子轰击器壁的再释和溅射脱附效应研究[J]. 广西民族大学学报, 2001, 7(4): 252-255 |
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| 作者姓名： | 王志文 |
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| 作者单位： | 广西民族学院物理与电子工程系 广西南宁530006 |
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| 摘 要： | 通过理论和四极质谱法 (QMS)获得了氦辉光放电清洗时的氢释放特性和氦再释特性 .氢在GDC(He)时的出气为双指数衰减规律 ,但壁脱附的衰减常数远大于机组和电离抽除的衰减时间常数 ,故主要表现为脱附衰减特性 ,这与实验基本相符 .GDC(He)后硅化层中的氦再释出气率的规律为 :氦的再释放与时间的 - 3/ 2成正比 .
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| 关 键 词： | 脱附 指数衰减 再释 |
| 文章编号： | 1007-0311(2001)04-0252-04 |
| 修稿时间： | 2001-10-10 |
H2 Outgassing Evolution During GDC(He) and He Reemission |
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| WANG Zhi wen. H2 Outgassing Evolution During GDC(He) and He Reemission[J]. Journal of Guangxi University For Nationalities, 2001, 7(4): 252-255 |
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| Authors: | WANG Zhi wen |
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| Abstract: | The evolution of H 2 out-gassing and He reemission is reached by theory analysis and QMS measure experience. The H 2 out-gassing evolution is two exponent attenuation, it's mainly the wall desorption attenuation because its constant is three orders of that of the pump. The results match the case of experiment. The helium reemission evolution is direct ratio to t -3/2 . |
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| Keywords: | desorption exponent attenuation reemission |
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