微机电混合陀螺仪的系统设计与仿真

研究了一种新型的微机电混合陀螺仪,它既具有实现传统动力调谐陀螺仪较高精度的潜力,又具有硅微陀螺仪体积小、价格低等优点.研究了该陀螺接口电路,推导了该接口信号灵敏度公式,分析表明增加检测电容Ct和Cb或者减小寄生电容Cp都可以提高信号灵敏度.同时,还推导了力矩器的力矩传递系数和信号器的电容信号传递系数公式,分析表明减小电容间距d和内环半径R1 或者增加外环半径R2都可以提高电容信号器灵敏度.提出一种利用力矩器负刚度效应对微机电混合陀螺进行调谐的方法,并研究了全解耦闭环反馈控制电路.开环仿真表明,残余刚度将导致转子自转轴进动,而调谐后转子自转轴能保持原方位稳定.闭环仿真表明,研究的全解耦闭环反馈控制电路是可行的.

System design and simulation of microelectromechanical hybrid gyroscope

Described in this paper is a microelectromechanical hybrid gyroscope with advantages not only in the potentiality of achieving high precision like the traditional dynamically tuned gyroscope(DTG),but also in small size and low cost like the Silicon Micromachined Gyroscope(SMG).An interface circuit is researched,the sensitivity equation of the interface circuit is deduced.The analysis shows that the signal sensitivity can be improved by increasing the sense capacitances Ct and Cb or decreasing the parasitica...