| Microstructure of flow pattern defects in boron-doped Czochralski-grown silicon |
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| 作者姓名： | LIU Caichi HAO Qiuyan ZHANG Jianfeng TENG Xiaoyun Sun Shilong QigangZhou WANG Jing XIAO Qinghua |
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| 作者单位： | [1]Institute of Information Functional Materials, Hebei University of Technology, Tianjin 300130, China [2]General Research Institute of Non-ferrous Metals, Beijing 100088, China |
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| 摘 要： | The morphology and microstructure of flow pattern defects （FPDs） in lightly boron-doped Czochralski-grown silicon （Cz-Si） crystals were investigated using optical microscopy and atomic force microscopy. The experimental results showed that the morphology of FPDs was parabola-like with several steps. Single-type and dual-type voids were found on the tip of FPDs and two heaves exist on the left and right sides of the void. All the results have proved that FPDs were void-type defects.
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| 关 键 词： | 流态缺陷 微观结构 原子力显微镜方法 硼掺杂 直拉法单晶硅 晶体生长 |
Microstructure of flow pattern defects in boron-doped Czochralski-grown silicon |
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| LIU Caichi HAO Qiuyan ZHANG Jianfeng TENG Xiaoyun Sun Shilong QigangZhou WANG Jing XIAO Qinghua.Microstructure of flow pattern defects in boron-doped Czochralski-grown silicon[J].Journal of University of Science and Technology Beijing,2006,28(8):793-793. |
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| Authors: | LIU;Caichi;HAO;Qiuyan;ZHANG;Jianfeng;TENG;Xiaoyun;Sun;Shilong;QigangZhou;WANG;Jing;XIAO;Qinghua |
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| Abstract: | The morphology and microstructure of flow pattern defects (FPDs) in lightly boron-doped Czochralski-grown silicon (Cz-Si) crystals were investigated using optical microscopy and atomic force microscopy. The experimental results showed that the morphology of FPDs was parabola-like with several steps. Single-type and dual-type voids were found on the tip of FPDs and two heaves exist on the left and right sides of the void. All the results have proved that FPDs were void-type defects. These results are very useful to investigate FPDs in Cz-Si wafers further and explain the annihilation of FPDs during high-temperature annealing. |
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| Keywords: | flow pattern defects grown-in defects atomic force microscopy Czochralski-grown silicon |
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