| 强束流脉冲Ta离子注入H13钢的背散射分析 |
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| 引用本文： | 杨建华. 强束流脉冲Ta离子注入H13钢的背散射分析[J]. 南通大学学报(自然科学版), 2002, 1(2): 14-16 |
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| 作者姓名： | 杨建华 |
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| 作者单位： | 南通工学院基础部,江苏,南通,226007 |
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| 基金项目： | 江苏省教育厅自然科学基金资助项目 |
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| 摘 要： | 利用从金属蒸汽真空弧离子源引出的强束流Ta离子,进行Ta离子注入钢的材料改性研究。研究结果表明,在离子注入剂量为5×1017cm-2,平均束流密度为40μA·cm-2,加速电压为42kV下,Ta离子注入能在钢表面形成厚达80nm的合金层。借助卢瑟福背散射(RBS),我们发现表面合金层中Ta的原子百分浓度在15%以上。
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| 关 键 词： | 背散射 离子注入 H13钢 |
| 文章编号： | 1671-5314(2002)02-0014-03 |
Rutherford Back Scattering Analysis of H13 Steel Implanted by Ta Ions High Flux Densities |
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| YANG Jian-hua. Rutherford Back Scattering Analysis of H13 Steel Implanted by Ta Ions High Flux Densities[J]. Journal of Nantong University (Natural Science Edition), 2002, 1(2): 14-16 |
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| Authors: | YANG Jian-hua |
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| Abstract: | Ta ions extracted from a metal vapor v acuum arc ion source were implanted i nto H13steel with various ion flux densi-ties.Ta concentration depth profil e in H13steel was calculated accordi ng to ion range profile and sputterin g theory.Rutherford back scattering showed that the Ta concentration depth profile in H13ste el wider than that of theory calculation.The thickness of alloy layer about 80nm. |
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| Keywords: | RBS ion implantation H13steel |
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