| 横向电压型压力传感器电极短路效应 |
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| 引用本文： | 齐薇佳,鲍敏杭.横向电压型压力传感器电极短路效应[J].复旦学报(自然科学版),1988(1). |
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| 作者姓名： | 齐薇佳 鲍敏杭 |
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| 作者单位： | 复旦大学电子工程系，复旦大学电子工程系 一九八四级硕士研究生 |
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| 摘 要： | 通过对横向电压型压力传感器上电势分布的数值分析得到了在各种器件几何尺寸情况下,电源电压、引出臂和输出电极的短路作用对灵敏度以及线性度的影响,提出了器件几何图形的最优化设计。
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| 关 键 词： | 分析 数值分析 压力 传感器 灵敏度 非线性。 |
ANALYSIS OF SHORT CIRCUIT EFFECT FOR TRANSVERSE VOLTAGE PRESSURE SENSOR |
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| Qi Weijia,Bao Minhang,.ANALYSIS OF SHORT CIRCUIT EFFECT FOR TRANSVERSE VOLTAGE PRESSURE SENSOR[J].Journal of Fudan University(Natural Science),1988(1). |
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| Authors: | Qi Weijia Bao Minhang |
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| Institution: | Department of Electronic Engineering |
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| Abstract: | The potential distribution has been found for transverse voltage piezoresistivepressure transducers by numerical analyses. The short circuit effects of voltage sup-ply electrodes, output electrodes and output conducting arms on sensitivity andnonlinearity have been obtained for various geometric configurations. The optimumgeometric design rules of the devices are suggested. |
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| Keywords: | analysis numerical analysis pressure transducer sensor sensitivity nonlinearity |
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