Soft initial-rotation and H∞ robust constant rotational speed control for rotational MEMS gyro |
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Authors: | Ma Gaoyin Chen Wenyuan Cui Feng Zhang Weiping & Wang Liqi |
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Institution: | National Key Lab. of Nano/Micro Fabrication Technology, Key Lab. for Thin Film and Microfabrication of Ministry of Education, Inst. of Micro and Nano Science and Technology, Shanghai Jiaotong Univ., |
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Abstract: | A novel soft initial-rotation control system and an H∞ robust constant rotational speed controller (RCRSC) for a rotational MEMS (micro-electro-mechanical system) gyro are presented. The soft initial-rotation control system can prevent the possible tumbling down of the suspended rotor and ensure a smooth and fast initial-rotation process. After the initial-rotation process, in order to maintain the rotational speed accurately constant, the RCRSC is acquired through the mixed sensitivity design approach. Simulation results show that the actuation voltage disturbances from the internal carrier waves in the gyro is reduced by more than 15.3 dB, and the speed fluctuations due to typical external vibrations ranging from 10 Hz to 200 Hz can also be restricted to 10−3 rad/s order. |
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Keywords: | micro-electro-mechanical system gyro rotation mixed sensitivity design H&infin robust controller |
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