| 微机械单晶硅陀螺仪谐振器结构参数设计 |
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| 引用本文： | 颜东,高钟毓,姚雅红. 微机械单晶硅陀螺仪谐振器结构参数设计[J]. 清华大学学报(自然科学版), 1997, 0(11) |
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| 作者姓名： | 颜东 高钟毓 姚雅红 |
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| 作者单位： | 清华大学精密仪器与机械学系 |
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| 基金项目： | 国防科工委预研课题资助 |
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| 摘 要： | 微机械单晶硅陀螺仪谐振器的结构参数设计对陀螺仪的机械性能影响很大，它决定了陀螺仪的水平和垂直方向的固有振荡频率，并影响微机械单晶硅陀螺仪谐振器的振荡幅度，因而，也直接影响微机械单晶硅陀螺仪的灵敏度。研究了微机械单晶硅陀螺仪谐振器的结构参数设计与其机械性能的关系，探讨了微机械单晶硅陀螺仪谐振器结构设计的一般原则，微机械单晶硅陀螺仪谐振器的结构参数对其动态性能有显著的影响，文中对此进行了仿真研究。
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| 关 键 词： | 特征频率；品质因数；静电力；微机械硅陀螺仪谐振器 |
Design of structure parameters for the resonantor of the single crystal silicon micromechanical gyro |
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| Yan Dong,Gao Zhongyu,Yao Yahong. Design of structure parameters for the resonantor of the single crystal silicon micromechanical gyro[J]. Journal of Tsinghua University(Science and Technology), 1997, 0(11) |
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| Authors: | Yan Dong Gao Zhongyu Yao Yahong |
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| Affiliation: | Yan Dong,Gao Zhongyu,Yao Yahong Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084 |
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| Abstract: | The resonantor is the key part of the single crystal silicon micromechanical gyro, and the mechanical performance and sensitivity of the single crystal silicon micromechanical gyro are decided by the design of structure parameters of the resonantor. In this paper, the relation between the structure parameters and its mechanical performance is studied. The rules of designing the structure parameters of the resonantor of the single crystal silicon micromechanical gyro are obtained by theoretical derivation and a lot of the dynamic simulations, and some useful results which describe the influence of the structure parameters on the performance of the resonantor are also studied. |
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