| 用PLC实现的磁溅式三靶真空镀膜机控制系统 |
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| 引用本文： | 徐祖华,王彦,雷运喜,朱慧玲.用PLC实现的磁溅式三靶真空镀膜机控制系统[J].南华大学学报(自然科学版),2003,17(3):59-61. |
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| 作者姓名： | 徐祖华 王彦 雷运喜 朱慧玲 |
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| 作者单位： | 南华大学,电气工程学院,湖南,衡阳,421001 |
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| 摘 要： | 设计的磁溅式三靶真空镀膜机控制系统,采用三菱PLC和EasyView触摸屏,具有参数设置、工艺流程控制、故障报警、保护等功能.文中介绍了PLC控制系统硬件与软件结构,以及对靶单元实现闭环控制,获得稳定靶电流情况.
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| 关 键 词： | PLC 硬件结构 软件结构 电流闭环控制 |
| 文章编号： | 1006-737X(2003)03-0059-03 |
| 修稿时间： | 2003年3月31日 |
The Control System of a Magnetic Scattering Vacuum Three-target Film Coating Machine Realized by PLC |
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| XU Zu-hu,WANG Yan,LEI Yun-xi,ZHU Hui-ling.The Control System of a Magnetic Scattering Vacuum Three-target Film Coating Machine Realized by PLC[J].Journal of Nanhua University:Science and Technology,2003,17(3):59-61. |
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| Authors: | XU Zu-hu WANG Yan LEI Yun-xi ZHU Hui-ling |
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| Abstract: | With Mitsubishi PLC and Easy View touch screen , the control system of magnetic scattering vacuum three-target film coating machine can set parameters, control process-flow, give alarm and protection in case break-down occurs. This paper introduces the software and the hardware structures of the PLCcontrol system as well as the close-circuit control of the target unit, which aims at stabilizing target current. |
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| Keywords: | PLC hardware structure software structure current close-circuit control |
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