| 电容式聚酰亚胺薄膜湿度敏感器的研究 |
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| 引用本文： | 谢廷贵,杨锦赐.电容式聚酰亚胺薄膜湿度敏感器的研究[J].厦门大学学报(自然科学版),1995,34(4):557-561. |
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| 作者姓名： | 谢廷贵 杨锦赐 |
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| 作者单位： | Xie Tingui; Yan Jingxu(Dept. of Elect.Eng。)(Dept.of Phys.) |
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| 摘 要： | 阐述了电容式聚酰亚胺薄膜湿度敏感器的结构和性能，分析讨论了它的感湿机理，并用一种指数函数方法对敏感器的非线性进行线性化处理。
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| 关 键 词： | 聚酰亚胺，相对湿度，指数函数 |
Sudyon Capacitive Humidity Sensor of Polvimide Film |
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| Xie Tingui, Yan Jingxu.Sudyon Capacitive Humidity Sensor of Polvimide Film[J].Journal of Xiamen University(Natural Science),1995,34(4):557-561. |
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| Authors: | Xie Tingui Yan Jingxu |
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| Abstract: | The structure and feature of capacitive humidity sensor of polyimide film areexpounded,and the mechanism of sensing humidity is analyzed and discussed.Meanwhile amethod of exponential function is used to linearize the nonlinearity of the sensor. |
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| Keywords: | polyimide Relative humidity Exponential function |
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