| 微型触觉传感器敏感单元的分析和测试 |
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| 引用本文： | 单保祥,王琪民.微型触觉传感器敏感单元的分析和测试[J].中国科学技术大学学报,1999,29(4):415-420. |
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| 作者姓名： | 单保祥 王琪民 |
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| 作者单位： | 中国科学技术大学精密机械与精密仪器系 |
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| 摘 要： | 对 Ｅ 型方膜结构传感器敏感单元进行了静态特性（ 变形、应力等） 和动态特性（ 固有频率、振型等） 的理论分析和有限元（ Ｆ Ｅ Ｍ） 计算．并采用自反馈光纤式麦克尔逊干涉仪测试了其动态特性参数．这一研究为微型触觉传感器敏感单元的优化设计和应用提供依据和支持
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| 关 键 词： | 触觉传感器 有限元 静态特性 动态特性 自反馈 |
Analysis and Testing of Sensitive Cells of Micro Tactile Sensors |
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| SHAN Baoxiang,WANG Qimin,YANG Haoyong.Analysis and Testing of Sensitive Cells of Micro Tactile Sensors[J].Journal of University of Science and Technology of China,1999,29(4):415-420. |
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| Authors: | SHAN Baoxiang WANG Qimin YANG Haoyong |
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| Abstract: | By means of comparative analysis between theories and finite element method (FEM) of the sensitive cells of a micro tactile sensor, the static and dynamic properties (such as stress, natural frequencies, modal etc.) of E type square diaphragms for sensors are presented. The dynamic parameters of the micro tactile sensor are tested by using the self feedback optical fiber interferometer. The experimental and analytical results provide support for the optimization design and application of the micro tactile sensor. |
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| Keywords: | tactile sensor finite element method static properties dynamic properties self feedback |
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