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SnO2:F透明导电薄膜及其物理特性
引用本文:胡启富,林秀森.SnO2:F透明导电薄膜及其物理特性[J].厦门大学学报(自然科学版),1990,29(5):525-528.
作者姓名:胡启富  林秀森
作者单位:厦门大学物理学系 (胡启富),厦门大学物理学系(林秀森)
摘    要:本文中报道优质SnO_2:F透明导电薄膜的制备方法,通过对薄膜透射率和电导(方块电阻)的测量分析,研究薄膜特性与工艺条件的关系,探讨最佳工艺条件和薄膜形成规律。提出一种SnO_2:F 晶体缺陷结构模型,可以较好解释电导随 F掺杂浓度的变化结果。

关 键 词:SnO2:F  导电  薄膜  物理特性  透明

Study of SnO_2:F Transparent Conducting Thin Films and Their Physical Properties
Hu Qifu Lin Xiuscn.Study of SnO_2:F Transparent Conducting Thin Films and Their Physical Properties[J].Journal of Xiamen University(Natural Science),1990,29(5):525-528.
Authors:Hu Qifu Lin Xiuscn
Institution:Hu Qifu Lin Xiuscn
Abstract:This paper reports preparation method of quality Sn02:F transparent conducting thin films. Base on the measures and analyses of the transmittance and sheet resistivity of Sn02:F films, we study relations between the properties and technological conditions of the films, explore the optimal technological conditions and formed law of the films. We have put forward a structural motel of defects in Sn02:F crystal which can fine explain changes of conductance with the concentration of fluorine dopant.
Keywords:Sn02:F transparent conducting films  Spray pyrolysis method  Sheet resistivity
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