| 微波放电等离子体性能研究 |
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| 引用本文： | 郑德修,金伟强.微波放电等离子体性能研究[J].西安交通大学学报,1996,30(1):7-12. |
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| 作者姓名： | 郑德修 金伟强 |
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| 基金项目： | 国家自然科学基金资助项目 |
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| 摘 要： | 利用自行设计建立的微波放电实验系统，运用静电双探针对产生的等离子体进行了测试，得承均匀磁场中微波输入功率、气体压强、气体种类等条件对等离子体参数及其分布的影响，并对实验结果答了简要分析。
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| 关 键 词： | 微波放电 等离子体 静电双探针 |
THE STUDY OF MICROWAVE DISCHARGE PLASMA CHARACTER |
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| Zheng,Dexiu,Jin,Weiqiang,Huang,Yuntian,Luo,Yilin.THE STUDY OF MICROWAVE DISCHARGE PLASMA CHARACTER[J].Journal of Xi'an Jiaotong University,1996,30(1):7-12. |
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| Authors: | Zheng Dexiu Jin Weiqiang Huang Yuntian Luo Yilin |
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| Institution: | School of Electronics and Information Engineering |
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| Abstract: | The plasma character has been tested by double electrostatic probes with specific microwave discharge device developed by the present authors. The plasma parameter and its distribution under varying input microwave power, gas pressure and gas kind have been obtained in uniform magnetic field, and brief analysis has also been carried out in accordance with the experiment results. |
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| Keywords: | microwave discharge plasma electrostatic double probes |
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