显微热成像系统的噪声等效温差和噪声等效辐射率差模型及其分析

提出一种可用于大规模集成芯片、生物医学和科学研究等显微热诊断的显微热成像设计方案.研究了显微热成像系统的噪声等效温差(NETD)和噪声等效辐射率差(NEED)模型,分析了显微热成像与望远模式热成像的差异.针对理想光子探测器和理想热探测器,探讨了显微热成像系统的NETD和NEED的关系.理论推导及仿真结果表明二者是以背景温度为函数的非线性关系.从理论上给出了提高显微热成像质量的一些建议.

Study on the Noise Equivalent Temperature Difference and Noise Equivalent Eradiation Difference Mathematical Models for Micro Thermal Imaging Systems

To provide means for minute sized thermal analysis for LSI,biomedical engineering and scientific research,micro thermal imaging systems were designed.Both the mathematical mode of noise equivalent temperature difference(NETD) and the noise equivalent eradiation difference(NEED) are established for micro thermal imaging systems.The difference between the micro pattern with the telescopic pattern is analysed.Based on the ideal photon detector and ideal thermal detector,the relationship between NETD and NEED is studied.The derivation and simulation demonstrates that the relationship between them is nonlinear based on the temperature of background.Some suggestions are given to improve image quality.