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能量和动量淀积深度分布的输运理论研究
引用本文:张竹林,张莱.能量和动量淀积深度分布的输运理论研究[J].四川大学学报(自然科学版),2004,41(4):778-783.
作者姓名:张竹林  张莱
作者单位:1. 安徽理工大学数理系,安徽,淮南,232001
2. 安徽理工大学计算机科学与技术系,安徽,淮南,232001
基金项目:ProjectsupportedinpartbytheScientificResearchFundfromtheEducationalBureauofAnhuiProvince(2 0 0 4kj12 7)
摘    要:作者对于离子束轰击无限大非晶或多晶靶,基于材料的平移不变性(TIM),证明了能量和动量淀积深度分布函数的勒让德多项式展开系数必定为无限可微函数,并假定这些分布函数存在.作者揭示了TIM与线性输运理论(LTE)之间的本质区别:当总散射截面为无限大时,TIM仍然正确,但LTE就不再正确了.对于m=0.5的幂散射截面,运用Pade逼近,由作者所构造的能量和动量淀积深度分布函数以及它们的勒让德多项式展开系数的深度分布函数,并没有发现所谓“奇点”和“不连续”.在某些情况下,靶表面动量淀积垂直分量并不发生符号变化.

关 键 词:溅射  能量淀积  动量淀积

Transport Theory Study of Depth Distribution Functions of Deposited Energy and Momentum
Abstract.Transport Theory Study of Depth Distribution Functions of Deposited Energy and Momentum[J].Journal of Sichuan University (Natural Science Edition),2004,41(4):778-783.
Authors:Abstract
Abstract:Based on the translational invariance of a medium (TIM), the authors have proved that the coefficient functions of Legendre polynomials expansion of the depth distributions of the deposited energy and momentum must be infinitely differentiable functions in amorphous or polycrystalline infinite target by ion bombardment, and if these functions exist. The intrinsic difference between TIM and the linear transport equations (LTE) has been revealed: TIM remains correct but LTE is untenable if the total scattering cross section goes to infinite. The depth distributions of the deposited momentum and their coefficient functions of Legendre polynomials expansions have been reconstructed based on the Pade approximants for the power cross section with m = 0.5 and no any "singularity" or "discontinuity" could be found. The component parallel to the incoming ion of the momentum deposited at the target surface may not change sign in some cases.
Keywords:sputtering  energy deposition  momentum deposition
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