椭球单毛细管高能X射线微焦斑透镜模拟表征

为了使单毛细管透镜在X射线微区分析中获得高能X射线微焦斑，设计并模拟了基于椭球单毛细管的高能X射线微焦斑透镜，并模拟透镜内表面镀金属氧化膜，氧化膜主要成分为HfO₂.结果表明：镀膜透镜和普通玻璃透镜都可以将能量为100 keV的X射线会聚成<10.0μm的焦斑；与普通玻璃透镜相比，透镜镀膜后X射线聚焦能量上限提高了约2倍.为增加镀膜透镜光通量，重新设计了镀膜透镜，该新透镜相比于最初设计的普通玻璃透镜，在相同的实验室光源条件下聚焦能量为100 keV的X射线，在焦斑处光通量提高了3.8倍，功率密度增益提高了1个数量级，这表明透镜镀膜对聚焦高能X射线有一定的应用价值.模拟结果对椭球单毛细管高能X射线透镜的研制和应用具有指导意义.

Simulation and characterization of ellipsoidal monocapillary X-ray lens with a micro focal spot for high energy X-ray

To obtain high-energy X-ray micro-focal size for monocapillary X-ray lens in X-ray micro-area analysis, a high-energy X-ray micro-focal spot lens based on ellipsoidal monocapillary was designed and simulated．The inner surface of lens coated with metal oxide film was simulated, the composition of which was HfO₂．Simulations showed that both coated and ordinary glass lens could focus X-rays at 100 keV into a focal size below 10 microns．Compared with ordinary glass lenses, the upper limit of X-ray focusing energy was increased 2-fold after coating the lens．To improve input flux, the coated lens was redesigned．Compared with glass lens, newly coated lens showed a 3.8-fold increase in luminous flux at the focal size at 100 keV, the power density gain increased by an order of magnitude, indicating that lens coating was valuable to focus high-energy X-rays．It is concluded that simulations could guide fabrication and application of ellipsoidal monocapillary high-energy X-ray lenses．