稀土Dy掺杂纳米CdO薄膜的特性分析

为改善氧化物半导体薄膜的特性,采用真空热蒸发法在玻璃衬底上制备稀土Dy掺杂纳米CdO薄膜并进行热处理,对薄膜进行结构、电学和光学特性进行测试分析。实验结果给出:掺杂稀土Dy后CdO薄膜沿(111)晶向的衍射峰增强,随掺Dy含量增大峰强度逐渐减弱,掺Dy含量为5%时可促进CdO薄膜晶粒的生长,改善薄膜晶相结构特性。制备的薄膜表面颗粒均匀,存在颗粒聚集现象。掺Dy含量为9%时,在波长大于900 nm的范围透光率可达90%,高于纯CdO薄膜。

Structure and Optical Characteristics of Dy-doped CdO Thin Films

Dy-doped CdO thin films on glass substrates were prepared by vacuum evaporation , then they were heat-treated in oxygen.The structure and optical characteristics of thin films were tested and analyzed.The XRD spectra shows that the thin film with Dy -doping at 5%is polycrystal line structure and the diffrac-tion peak along （111） of the thin films are strengthened.The results show the crystallization and structure of the CdO films have been improved by Dy -doping.The grains on the film surface are homogenous and exhibit the accumulation phenomenon.The transmitting ratio of thin films increases at 9%of Dy-doping and reaches up to 90%in about 900 nm wavelength area , and is higher than that of pure CdO thin Films.